Laminar Flow Differential Pressure Gas Mass Flow Controller

The V-series laminar flow controllers employ a proprietary, in-house‑developed precision proportional valve and an accompanying control algorithm, enabling fast, accurate, and stable gas flow regulation. The control range spans 10 SCCM to 500 SLPM, with a working pressure of 1.0 MPa and an accuracy of 0.5%.

Laminar Flow Differential Pressure Gas Mass Flow Meter

The V-series laminar flow meter employs a self-developed sensor and an independently designed laminar flow element, ensuring high measurement accuracy and rapid response through careful consideration of material properties and fluid characteristics. Flow range: 0.5 SCCM to 5,000 SLPM; operating pressure: 1.0 MPa; accuracy: 0.5%.

Gas pressure controller

The V-series pressure controllers feature a proprietary, in-house‑developed precision proportional valve and a corresponding control algorithm. The single‑valve version is suitable for regulating both positive and back pressures, while the dual‑valve version is designed to ramp up or down pressure in pressure vessels and maintain a setpoint pressure.